mems传感器的现状及发展前景
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2024-05-17 02:25:29
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毕业设计指课论文mems传感现状及发展前景摘要:mems传感器是随米技术的发展而兴起的新型传感器,具有很多新的特性,相对传统传感器其具有更大的优势。在追求微型化的当代,其具有良好的发展前景,必将受到各个**越来越多的重视。文章首先介绍了mems传感器的分类和典型应用,然后着重对几个传感器进行了介绍,最后对mems传感器的发展趋势与发展前景进行了分析。关键词:mems传感器;加度计;陀螺仪;纳米技术;微机构;微传感器status and development prospect of mems sensorsabstract:mems sensor ** a new type of sensor with the development of nanotechnology. it has many new features, which has a great advantage over traditional sensors. in the pursuit of miniaturization of the contemporary, its good prospects for development, will be subject to more and more attention in various countries. firstly, the classification and typical application of mems sensor are introduced. then, several sensors are introduced. finally, the development trend and development prospect of mems sensor are analyzed.key words:mems sensor; accelerometer; gyroscope; nanotechnology; micro-mechan**m; micro-sensormems传感器是采用微机械加工技术制造型传感器,是mems器件的一个重要分支。1962年, 20210311